Implementing an integrated framework for internal logistics management in automated semiconductor manufacturing

Nowadays, productivity and ergonomic reasons impose the use of Automated Material Handling Systems (AMHS) to transfer work‐in‐process within modern semiconductor factories. It is necessary to manage the AMHS to attain high throughput and short cycle times. Traditional simulation‐based models considered the AMHS as an isolated system and do not provide formal modelling approaches necessary for its efficient reuse and management. This paper studies the implementation of a global modelling framework for the operational behaviour of wafer factories by using an efficient AMHS control policy.