Smooth boundary topology optimization for eigenvalue performance and its application to the design of a flexural stage

The new topology optimization method known as smooth boundary topology optimization (SBTO) is enhanced to deal with natural frequencies as a design characteristic. SBTO combines boundary representation using computer graphics with a selection criterion which determines the usefulness of generating a hole. Topological changes such as hole generation and hole merging are successfully implemented. SBTO is used to establish a systematic procedure for the design of a flexural stage is established. When designing flexural stages, it is necessary to be compliant in the actuating or moving direction and stiff in the parasitic direction, and the optimization related to maximizing the difference between the first and second natural frequency is formulated. SBTO has been shown to be a promising methodology for topology optimization with smooth boundaries in the design of a flexural stage.