| Article ID: | iaor200217 |
| Country: | United Kingdom |
| Volume: | 17 |
| Issue: | 3 |
| Start Page Number: | 205 |
| End Page Number: | 218 |
| Publication Date: | Jun 2001 |
| Journal: | Quality and Reliability Engineering International |
| Authors: | Runger George C., Montgomery Douglas C., Heredia-Langner Alejandro, Borror Connie M., Post Richard I. |
| Keywords: | electronics industry, control charts |
In this paper we demonstrate the use of control charts based on orthogonal contrasts for a semiconductor manufacturing process. The statistical performance of individual control charts based on these contrasts and their exponentially weighted moving average counterparts is compared to that of the traditional approach. Contrast-based charts have superior detection capabilities than the traditional approach when targeted at specific process disturbances.