Jen Chih-Hung

Chih-Hung Jen

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Found 1 papers in total
Single-input, single-output run-to-run feedback controller using triple exponentially weighted moving average smoothing for semiconductor manufacturing processes
Single-input, single-output run-to-run feedback controller using triple exponentially weighted moving average smoothing for semiconductor manufacturing processes
2002
During the past decade, a variety of ‘run-to-run’ (R2R) control schemes...
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